- Device
- Technical University Darmstadt
Alcatel 4“ Sputtering machine
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Sputtering System
- Device Name
- Alcatel 4“ Sputtering machine
- Device Variants
- Wafer-Sputteranlage
Device Description
4x4" wafers; loading magnet arm and lock; Cr; Cu; Al; SiO2; Ni.
Device Application
Metallization of 4" wafers.
