- Device
- Technical University Darmstadt
2x Hotplate + Waferlift
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Hotplate
- Device Name
- 2x Hotplate + Waferlift
- Device Variants
- Wafer Hotplate
Device Description
Programmable timer.
Device Application
Pre-bake or post-bake of photoresists.