- Device
- Technical University Darmstadt
Balzers BAK 600 (PVD)
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Vapor Deposition System
- Device Name
- Balzers BAK 600 (PVD)
- Device Variants
- Metal Vapor Deposition System
Device Description
Vapor deposition system for depositing the following metals: Cr, Au, Ni, Al, Cu, Ti; 11x 4" wafers.
Device Application
Metallization of 4" wafers, application of layer systems.
