- Device
- Technical University Darmstadt
Leybold-Heraeus
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Vapor Deposition System
- Device Name
- Leybold-Heraeus
- Device Variants
- E-Beam and Thermal Vapor Deposition System
Device Description
E-beam and thermal vapor deposition system.
Device Application
Thermal vapor deposition of Au and Ge. E-beam vapor deposition of Ni, Ti, Al, Pd, and other metals. Angled vapor deposition is also possible.
