- Device
- Technical University of Darmstadt
µMLA Heidelberg Instruments
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Exposure System
- Device Name
- µMLA Heidelberg Instruments
- Device Variants
- Direct Exposure System
Device Application
Rapid prototyping, writing small masks, e.g. for micro‑optics, MEMS, fan‑out electrodes, sensors.
Core Facility
ETIT Clean Room Facilities
Project Status
default
