- Device
- Technical University Darmstadt
Logitech PM5
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Polishing System
- Device Name
- Logitech PM5
- Device Variants
- Wafer Polishing System
Device Description
Mechanical polishing of 4-inch wafers with planarity under 100 nm.
Device Application
MEMS fabrication.
