- Device
- Technical University Darmstadt
Moorfield MiniLab25
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Sputtering System
- Device Name
- Moorfield MiniLab25
- Device Variants
- Sputtering System for Wafers
Device Description
Sputtering and PVD of 2" and 4" wafers; CrNi; Cr; Cu; Au; Ti.
Device Application
Fabrication of MEMS, sensors, micro-heating elements.
