- Device
- Technical University Darmstadt
R3T Muegg STP 2020
- Materials Science
- Structuring and Processing of Materials
- Device Type
- Asher
- Device Name
- R3T Muegg STP 2020
- Device Variants
- Plasma Asher
Device Description
Polymer asher for removing SU8 and BCB; Available gases: O₂, N₂, CF₄; HF power: 3000 W, 2.45 GHz.
Device Application
SU8 structures, activation, stripping; 5 slots for 6" substrates.
