- Device
- Goethe University Frankfurt
FEI Nova NanoLab 600 DualBeam FIB/SEM
- Chemistry
- Geosciences
- Physics
- Life Sciences
- Biochemistry
- Biophysics
- Electron Microscopy
- Device Type
- Electron Microscope
- Device Name
- FEI Nova NanoLab 600 DualBeam FIB/SEM
- Device Variants
- Scanning Electron Microscope
Device Description
The FEI Nova NanoLab 600 is a dual-beam FIB-SEM system with a Schottky field emission gun (FEG) for SEM and a gallium liquid metal ion source (LMIS) for FIB. Key specifications include an SEM resolution of 1.1 nm at 15 kV, a voltage range from 200 V to 30 kV, a beam current of up to 20 nA, a FIB resolution of 10 nm, a voltage range from 500 V to 30 kV, and a beam current from 1 pA to 21 nA. Special features include a self-built gas injection system for non-commercial precursor sources, special sample holders, and integrated electronics for in-situ characterization of the prepared scientific samples.
Device Application
The FEI Nova NanoLab 600 is used for both advanced imaging and nanoscale manufacturing. In particular: deposition of FEBID/FIBID nanostructures (insulators, metals, ferromagnets, superconductors), RT in-situ measurements of electrical transport, TEM lamella preparation.
