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Project
Device

Technical University Darmstadt

Mask Aligner Karl Süss MJB3

Exposure System
Project
Device

Technical University Darmstadt

Suess Microtec LabSpin6

Spin Coater
Project
Device

Technical University Darmstadt

Surface Profiler DEKTAK 6M

Surface Profiler
Project
Device

Technical University Darmstadt

Surface Profiler DEKTAK 8

Surface Profiler
Project
Device

Technical University Darmstadt

µMLA Heidelberg Instruments

Exposure System
Project
Device

Technical University Darmstadt

Thermo Fisher Phenom Pro x

Electron Microscope
Project
Device

Technical University Darmstadt

Logitech PM5

Polishing System
Project
Device

Technical University Darmstadt

MOT semicon

Electroplating System
Project
Device

Technical University Darmstadt

Diener Plasma system Nano

Plasma Cleaner
Project
Device

Technical University Darmstadt

Moorfield MiniLab25

Sputtering System
Project
Research Project

Uniform Structures in Arithmetic and Geometry

The LOEWE focus group on “Uniform Structures in Arithmetic and Geometry” addresses the fundamental question of whether ...
Project
Device

Technical University Darmstadt

Mask Aligner Karl Süss MA 56

Exposure System